بررسی پایداری و مکانیزم تخریب پوشش‌های ژرمانیوم-کربن در محیط مه نمکی

نوع مقاله : مقاله پژوهشی

نویسندگان

1 دانشگاه صنعتی مالک اشتر

2 دانشگاه مالک اشتر

چکیده

در پژوهش حاضر، پوشش‌های ژرمانیوم-کربن (Ge1-x-Cx) به وسیله فرایند رسوب‌دهی شیمیایی بخار به کمک پلاسما (PECVD) با استفاده از پیش‌ماده‌های گازی GeH4 و CH4 روی زیرلایه‌های سیلیسیومی و شیشه‌ای رسوب داده شدند. به منظور بررسی پایداری محیطی پوشش‌ها، از آزمون مه نمکی استفاده شد. به منظور مشخصه‌یابی ریزساختاری و پیوندی پوشش‌ها به ترتیب از میکروسکپ الکترونی روبشی گسیل میدانی (FESEM) مجهز به طیف‌سنج تفکیک انرژی (EDS) و طیف‌سنج فوتوالکترون پرتو ایکس (XPS) استفاده شد. بررسی کیفیت فیزیکی نمونه‌ها پس از گذشت 24 ساعت قرارگیری در معرض مه نمکی، پایداری بسیار مناسب تمام پوشش‌های ژرمانیوم-کربن رسوب داده شده در شرایط مختلف را نشان داد؛ به گونه‌ای که هیچ اثری از کنده شدن، پوسته شدن، ترک برداشتن و تاول زدن روی نمونه‌ها مشاهده نشد. ارزیابی‌های میکروسکپی الکترونی روبشی از سطح رویی پوشش‌ها نیز این موضوع را اثبات کرد. تنها برای پوشش Ge1-x-Cx غنی از کربن، بخش‌هایی از لبه‌های پوشش‌ تخریب شد. سازوکار تخریب پوشش به صورت تاول زدن و توسعه ترک به واسطه نفوذ مولکول‌های آب به فصل مشترک آزاد پوشش/ زیرلایه تشخیص داده شد.

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